Method of observing secondary ion image by focused ion beam
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United States of America Patent
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Jan 23, 2001
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N/A
app pub date -
Jan 22, 1999
filing date -
Jan 23, 1998
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Abstract
A high-resolution secondary ion image is observed by first and second processing steps. In the first step, the focus of the ion optics is adjusted while observing a secondary electron image at an image refresh rate of a few or several seconds. In the second step, secondary ions are detected with a secondary charged-particle detector without readjusting the focus of the ion optics. A secondary ion image is observed at a scanning rate of tens to hundreds of seconds/frame. Thus, a focused high-resolution secondary ion image is derived.
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