Electrostatic chuck and method of manufacturing electrostatic chuck

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 11869797
APP PUB NO 20220367227A1
SERIAL NO

17743003

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Importance

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Abstract

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An electrostatic chuck includes a base plate that is made of a metal; a ceramic plate that is fixed to the base plate and configured to adsorb an object by electrostatic force; and a bonding layer that is provided between the base plate and the ceramic plate to bond the base plate and the ceramic plate to each other. The bonding layer is formed of a composite material including the metal forming the base plate and a ceramic forming the ceramic plate.

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Patent Owner(s)

Patent OwnerAddress
SHINKO ELECTRIC INDUSTRIES CO LTD80 OSHIMADA-MACHI NAGANO-SHI NAGANO 381-2287

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Okamoto, Naomi Nagano, JP 22 126
Takahashi, Ryuji Nagano, JP 23 99

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