Probe device, probe card channel information creation program, and probe card information creation device
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Nov 8, 2005
Grant Date -
Jun 30, 2005
app pub date -
Jan 21, 2005
filing date -
Jul 22, 2002
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A probe device includes a supporting member for supporting the probe card having a plurality of channels. Each of the channels has a group of probes which are brought into contact with plural electrode pads of one of objects to be inspected. The probe device further includes a channel information creation unit for creating channel information containing a layout of a group of the plurality of channels and an identification number of each of the channels and transmitting the created channel information to a controller, a channel information memory unit for storing the channel information received from the channel information creation unit, and an object layout memory unit for storing layout information of the objects. The controller performs an inspection of the objects based on the channel information stored in the channel information memory unit and the layout information of the objects stored in the object layout memory unit.
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