Drive device driving a movable portion in a vacuum chamber

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United States of America Patent

PATENT NO 11915865
APP PUB NO 20210043350A1
SERIAL NO

16978349

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A movable-side magnet is provided to a movable portion in a vacuum chamber. A drive unit is provided outside the vacuum chamber, and drives the movable portion by exerting magnetic force on the movable-side magnet. The drive unit has a first magnet, a second magnet, and a moving mechanism (moving member). The first magnet exerts magnetic force of attracting the movable-side magnet. The second magnet is provided to be adjacent to the first magnet, and exerts magnetic force of repelling the movable-side magnet. The moving mechanism integrally moves the first magnet and the second magnet.

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Patent Owner(s)

  • SHIMADZU CORPORATION

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Furuta, Masaji Kyoto, JP 10 107
Kodera, Kei Kyoto, JP 13 59
Watanabe, Kiyoshi Kyoto, JP 222 2416

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