Sonic cleaning system and method of sonic cleaning a workpiece

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United States of America Patent

PATENT NO 11602776
APP PUB NO 20200230661A1
SERIAL NO

16735489

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Importance

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Abstract

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In some embodiments, a sonic cleaning system includes a tank configured to receive a liquid that enables propagation of sonic waves and a cylindrical insert located within the tank. The cylindrical insert includes a first end having a first opening and a second end opposite the first end. The second end has a second opening. The cylindrical insert is configured to suspend a workpiece between the first opening and the second opening. The sonic cleaning system includes a sonic transducer located within the cylindrical insert.

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Patent Owner(s)

  • APPLIED MATERIALS INC.

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Coughlin, Michael J San Jose, US 15 78
Wang, Jianqi Fremont, US 15 212

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