Recycling by mechanical means of a wafer comprising a multilayer structure after taking-off a thin layer thereof

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 7602046
APP PUB NO 20050150447A1
SERIAL NO

11075323

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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The invention relates to a recyclable donor wafer that includes a substrate and a formed layer thereon, wherein the formed layer has a thickness sufficient to provide (a) at least two useful layers for detachment therefrom and (b) additional material that can be removed to planarize exposed surfaces of the useful layers prior to detachment from the donor wafer.

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First Claim

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Patent Owner(s)

  • SOITEC

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Akatsu, Takeshi Saint Nazaire Les Eymes , FR 30 273
Aulnette, Cécile Grenoble , FR 9 12
Faure, Bruce Grenbole , FR 40 453
Ghyselen, Bruno Seyssinet-pariset , FR 135 2147
Osternaud, Bénédite Saint Laurent Du Pont , FR 2 5

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