Automatically replaceable apparatus for collecting byproducts and the controlling method thereof in equipment producing semiconductor
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United States of America Patent
Stats
-
Feb 22, 2011
Grant Date -
Dec 10, 2009
app pub date -
Sep 8, 2006
filing date -
Jul 13, 2006
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
Disclosed herein are an automatically replaceable apparatus for collecting byproducts in semiconductor producing equipment and a control method thereof. The apparatus includes several trap units mounted to a vertical shaft at regular angular intervals and rotating in response to a driving direction of a servo motor. Upper and lower plates support the vertical shaft, and connect byproduct inlet and outlet ports, cleaning-water supply and discharge ports, and dry-gas supply and exhaust ports to the respective trap units. Trap and plate coupling means are extended at normal times to air-tightly seal gaps between the upper and lower plates and the trap units, and contracted when the trap units are rotated in a predetermined direction for the replacement. The servo motor is mounted to a lower surface of the lower plate and rotates the trap units within a predetermined angular range. A control unit controls the operation of the components.
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