Micro device having a movable structure

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United States of America Patent

PATENT NO 8368196
SERIAL NO

12710571

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Abstract

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The micro device includes a support substrate, and a movable structure configured to move with respect to the support substrate. At least one of the support substrate and the movable structure is provided with at least one protrusion protruding towards the other of the support substrate and the movable structure. Further, a base portion extending into the one of the support substrate and the movable structure is provided integrally with the at least one protrusion. With this configuration, the protrusion is securely held by the base portion, and the detachment of the protrusion can therefore be prevented even after repeated collisions between the support substrate and the movable structure via the protrusion.

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Patent Owner(s)

  • KABUSHIKI KAISHA TOYOTA CHUO KENKYUSHO

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Akashi, Teruhisa Nagoya, JP 40 472
Fujiyoshi, Motohiro Sato, JP 30 636
Funabashi, Hirofumi Nagoya, JP 24 456
Nonomura, Yutaka Nagoya, JP 50 1774

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