Vacuum drying apparatus and method of manufacturing film using the same

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United States of America Patent

PATENT NO 10052657
APP PUB NO 20170317318A1
SERIAL NO

15236805

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Abstract

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A method of manufacturing a film includes disposing a substrate under one side of a baffle plate in a film manufacturing space, the baffle plate having a plurality of through-holes, and spraying an inert gas toward the substrate through a plurality of nozzle tips branched from a gas distribution pipe that is disposed over an other side of the baffle plate such that the inert gas penetrates the baffle plate through the through-holes.

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Patent Owner(s)

  • SAMSUNG DISPLAY CO., LTD.

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kishimoto, Katsushi Seoul, KR 54 687

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