Method of defect repairing in graytone part in graytone mask
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United States of America Patent
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-
Nov 23, 2004
Grant Date -
Oct 2, 2003
app pub date -
Mar 28, 2002
filing date -
Mar 28, 2002
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
Repairing patterns 3a' and 3b' different in width and position respectively from regular patterns 3a and 3b by partially removing a repairing film 8 in the form and/or the disposition of achieving a graytone effect equal to the graytone effect of a regular pattern after forming the repairing film 8 in an area containing clear defects.
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Cited Art Landscape
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