System for transferring substrate
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United States of America Patent
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Aug 22, 2023
Grant Date -
Jun 4, 2020
app pub date -
Sep 10, 2019
filing date -
Nov 29, 2018
priority date (Note) -
In Force
status (Latency Note)
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Abstract
A system for transferring a substrate includes a substrate transporter at which is captured a first image with which a position of the substrate at the substrate transporter is determined; a tray at which is captured a second image with which a position of each of a plurality of substrates relative to the tray is determined; a substrate mover with which the substrate is movable in a revolving manner between the substrate transporter and the tray, the substrate mover including: an arm portion movable in the revolving manner between the substrate transporter and the tray, and a substrate securing portion movable together with the arm portion; and an imager with which the first image and the second image are captured, the imager connected to the arm portion and movable in the revolving manner between the substrate transporter and the tray together with the arm portion.
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