Ultrashort-pulse laser-working method and apparatus and structural bodies produced by using the same
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United States of America Patent
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Jul 4, 2006
Grant Date -
Jan 27, 2005
app pub date -
Jun 16, 2004
filing date -
Jun 26, 2003
priority date (Note) -
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Abstract
A laser-working method is disclosed, which includes the steps of splitting a single pulse laser beam having a time width of not more than 500 picoseconds into plural pulse laser beams; subjecting said plural pulse laser beams to time delaying, and adjusting a working surface-irradiating shape, an intensity distribution and a working surface-irradiating position of each of the plural pulse laser beams; working a target object to be irradiated, while the respective working surface-irradiating shapes of said plural laser beams are partially or entirely spatially overlapped with each other or one another; and setting to a time interval of from a pulse width to 1 nanosecond a time period during which each of the pulse laser beams is irradiated.
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