Extreme ultraviolet mask and method of manufacturing the same

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 11275301
APP PUB NO 20200073225A1
SERIAL NO

16530218

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Abstract

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An extreme ultraviolet (EUV) mask includes a multilayer Mo/Si stack comprising alternating Mo and Si layers disposed over a first major surface of a mask substrate, a capping layer made of ruthenium (Ru) disposed over the multilayer Mo/Si stack, and an absorber layer on the capping layer. The EUV mask includes a circuit pattern area and a particle attractive area, and the capping layer is exposed at bottoms of patterns in the particle attractive area.

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Patent Owner(s)

  • TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Cheng, Kuotang Hsinchu, TW 3 3
Chien, Tsung-Chih Nantou County, TW 14 13
Fu, Chi-Hua Hsinchu County, TW 4 11
Fu, Shih-Chi Hsinchu County, TW 57 346
Lee, Tsung Chuan Taipei, TW 10 3
Liu, Bo-Tsun Taipei, TW 53 98
Shih, Chih-Tsung Hsinchu, TW 130 1910

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