Adaptive shape substrate support method
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United States of America Patent
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-
Mar 17, 2009
Grant Date -
Dec 1, 2005
app pub date -
May 25, 2005
filing date -
May 28, 2004
priority date (Note) -
Expired
status (Latency Note)
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Abstract
The present method features an active compliant pin chuck to hold a substrate, having opposed first and second surfaces, and compensates for non-planarity in one of the surfaces of the substrate. To that end, the method includes creating a point contact on the first surface to generate a change in shape of the second surface to obtain a desired shape of the second surface. The desired shape may be smooth, if not substantially planar or any other shape desired within the operational parameters of the chuck and the substrate. For example, the method may compensate for non-planarity due to particulate matter on the first surface and substrate topography. These and other embodiments are discussed more fully below.
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