Exhaust device, processing system, and processing method

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 11807938
APP PUB NO 20200248305A1
SERIAL NO

16775439

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Importance

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Abstract

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An exhaust device includes: a first pressure regulator provided in an exhaust pipe connected to a processing container; a second pressure regulator provided on a downstream side of the first pressure regulator; a first vacuum gauge provided on an upstream side of the first pressure regulator; and a second vacuum gauge provided between the first pressure regulator and the second pressure regulator.

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Patent Owner(s)

  • TOKYO ELECTRON LIMITED

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kanemura, Rui Yamanashi, JP 8 2
Motoyama, Yutaka Yamanashi, JP 23 59

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