Systems and methods for generating a conductive liquid comprising deionized water with ammonia gas dissolved therein

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United States of America Patent

PATENT NO 11826713
APP PUB NO 20200391163A1
SERIAL NO

17005560

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Abstract

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Systems and methods are described for dissolving ammonia gas in deionized water. The system includes a deionized water source and a gas mixing device including a first inlet for receiving ammonia gas, a second inlet for receiving a transfer gas, and a mixed gas outlet for outputting a gas mixture including the ammonia gas and the transfer gas. The system includes a contactor that receives the deionized water and the gas mixture and generates deionized water having ammonia gas dissolved therein. The system includes a sensor in fluid communication with at least one inlet of the contactor for measuring a flow rate of the deionized water, and a controller in communication with the sensor. The controller sets a flow rate of the ammonia gas based on the flow rate of the deionized water measured by the sensor, and a predetermined conductivity set point.

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Patent Owner(s)

Patent OwnerAddress
MKS INSTRUMENTS INC2 TECH DRIVE SUITE 201 ANDOVER MA 01810

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Brammer, Ulrich Alfred Berlin, DE 8 5
Le, Tiec Christiane Berlin, DE 6 3
Seiwert, Johannes Berlin, DE 16 97

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