Manufacturing method for fine structure element, fine structure element manufactured by the method, spatial light modulator, and projector
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United States of America Patent
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-
Sep 2, 2008
Grant Date -
Oct 13, 2005
app pub date -
Mar 1, 2005
filing date -
Mar 4, 2004
priority date (Note) -
Expired
status (Latency Note)
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Abstract
Aspects of the invention can provide a manufacturing method for fine structure elements having a first flat portion forming step of forming an upper flat surface serving as a first flat portion on a substrate with a flat cutting tool serving as a cutting section a second flat portion forming step of cutting the upper flat surface serving as the first flat portion by a predetermined depth and forming a lower flat portion serving as a second flat portion with the flat cutting tool serving as the cutting section, a refractive surface forming step of forming a slope serving as a refractive surface having a predetermined angle with respect to the lower flat surface serving as the second flat portion by the flat cutting tool serving as the cutting section.
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