Systems and methods for statistical process control

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United States of America Patent

PATENT NO 7957821
APP PUB NO 20060106469A1
SERIAL NO

10989494

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A system for performing statistical process control. A storage device stores a plurality of SPC charts, specifying data collected from a system during testing. A controller categorizes the SPC charts into a plurality of groups based on characteristics thereof. A detector determines whether the charts in any of the groups violate a preset rule. An alarm generator generates alarm information identifying the chart violating the rule.

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Patent Owner(s)

  • TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chen, Ming-Fa Hsinchu Hsien, TW 460 3499
Huang, Ming-Chang Hsinchu Hsien, TW 8 36

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