Directional coupler

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 11552657
SERIAL NO

17035003

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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The invention relates to a directional coupler comprising a non-straight main conductor line for receiving a high power signal and at least one coupling element. The main conductor line is arranged to run in a plane P0. The at least one coupling element is arranged sectionally parallel to the main conductor line. Further, the invention relates to a method for measuring RF voltage and/or RF power using a directional coupler. The method comprises the steps of combining the measured signals of the directional coupler and the measured voltage and current values of the VI sensor unit. In case, one of the measured signals has a low or zero level the sensitivity of the measuring of RF voltage and/or RF power is increased.

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Patent Owner(s)

  • COMET AG PLASMA CONTROL TECHNOLOGIES

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Grede, André Bern, CH 9 3
Schwerg, Nikolai Bern, CH 6 6

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