Lamb wave resonator
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United States of America Patent
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Jan 11, 2011
Issued Date -
N/A
app pub date -
Oct 21, 2008
filing date -
Oct 22, 2007
priority date (Note) -
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Abstract
A Lamb wave resonator includes a piezoelectric layer, and a first electrode against a first face of the piezoelectric layer. The first electrode includes fingers and a contact arm, with each finger including a first side in contact with the contact arm and two other sides parallel to one another. Portions of the piezoelectric layer are at least partially etched between the two fingers to form a recess. The fingers are spaced apart from one another by a distance W calculated according to the following equation:
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