Substrate, electro-optical device, electronic apparatus, method of forming substrate, method of forming electro-optical device, and method of forming electronic apparatus

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United States of America Patent

PATENT NO 7413978
APP PUB NO 20060043592A1
SERIAL NO

11176248

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Abstract

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A contact structure, including: a first conductive layer; a insulating layer formed on the first conductive layer; a second conductive layer formed on the insulating layer; and a columnar structure, buried in a direction of film thickness in the insulating layer, electrically connecting the first conductive layer and the second conductive layer; wherein a reinforcement material is adhered to a vicinity of a root of the columnar structure.

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Patent Owner(s)

  • SEIKO EPSON CORPORATION

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Tanaka, Hideki Chino, JP 442 4969

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