Charged particle beam device and method for adjusting position of detector of charged particle beam device

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United States of America Patent

PATENT NO 11342155
SERIAL NO

17056285

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Abstract

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In a charged particle beam device including a deceleration optical system, a change in a deceleration electric field and an axis shift due to a structure between an objective lens and a sample are prevented to reduce adverse effects on an irradiation system and detection system. The charged particle beam device includes an electron source, an objective lens configured to focus a probe electron beam from the electron source on the sample, an acceleration electrode configured to accelerate the probe electron beam, a first detector provided in the acceleration electrode, a deceleration electrode configured to form a deceleration electric field for the probe electron beam with the acceleration electrode, the probe electron beam being configured to pass through an opening of the deceleration electrode, and a second detector inserted between the deceleration electrode and the sample. The second detector includes an opening portion larger than the opening of the deceleration electrode, and a sensing surface is provided around the opening portion.

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Patent Owner(s)

  • HITACHI HIGH-TECH CORPORATION

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Imai, Yuta Tokyo, JP 15 33
Sasajima, Masahiro Tokyo, JP 17 65
Takahoko, Yoshihiro Tokyo, JP 8 26

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