Tangential fan for excimer laser
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United States of America Patent
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May 9, 2000
Grant Date -
N/A
app pub date -
Aug 28, 1998
filing date -
Aug 28, 1998
priority date (Note) -
In Force
status (Latency Note)
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Abstract
A tangential fan for recirculating a lasing gas mixture has blade members, which vary in circumferential position stepwise from end to end. The number of blade members can be constant or variable between ends. The circumferential position of blade members can shift monotonically or reversibly between ends. Blade members are stiffened by one or more transverse annular hub members. A method of forming a tangential fan involves forming monolithic structures by casting or by machining from a solid block. Two or more monolithic structures can be joined together, typically by electron-beam welding. Casting, welding, and machining processes introduce no additional contaminants. Tangential fans produced have mechanical rigidity, accurate tolerances, and low contaminant concentrations. Methods provided by the invention facilitate forming of blade members into an air foil shape. Finishing processes typically include post-machining, electropolishing, and electroless nickel coating.
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