Method and apparatus for scheduling work in a fabrication facility
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United States of America Patent
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Jun 26, 2007
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N/A
app pub date -
Jul 20, 2005
filing date -
Jul 20, 2005
priority date (Note) -
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Abstract
A method and apparatus for scheduling work in a semiconductor fabrication facility is provided. The method includes determining a time period associated with processing of at least one wafer, determining at least one due time associated with processing of the at least one wafer, and scheduling the at least one wafer for processing based on the time period and the at least one due time.
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