Device for the non-contact storage of components
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United States of America Patent
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-
May 18, 2004
Grant Date -
N/A
app pub date -
Jan 16, 2002
filing date -
Apr 14, 1999
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A semiconductor gas sensor, for example for measuring CO, NO.sub.x, O.sub.3, etc., exhibits a heatable sensor element for measuring gas concentrations, and a housing in whose interior the sensor element is disposed. The housing has a first opening, which connects the interior to the exterior. The housing has one or more second openings, which lie deeper than the first opening so that a gas stream is driven by means of convection from the second opening to the first opening. The semiconductor gas sensor can be made of silicon by means of micro engineering.
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