Micro-actuator with electric spark preventing structure, HGA, and disk drive unit with the same, and manufacturing method thereof
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United States of America Patent
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Apr 14, 2009
Grant Date -
May 17, 2007
app pub date -
Nov 15, 2005
filing date -
Nov 15, 2005
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A micro-actuator includes a metal frame having two side arms, a top support arm and a bottom support arm respectively connected with the top ends of the two side arms. The two side arms are in parallel with and spaced from each other a distance adapted to hold a slider therebetween that is mounted on the top support arm. An isolation layer is coupled with each side arm of the metal frame; and a piezoelectric element is bonded with the isolation layer. When operating the micro-actuator, an electric sparking problem will not occur for existence of the isolation layer. The invention also disclose a method of manufacturing the micro-actuator, a HGA and disk drive unit with the micro-actuator.
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