Method and apparatus for thin film solar cell manufacturing
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United States of America Patent
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Nov 16, 2010
Grant Date -
Apr 26, 2007
app pub date -
Oct 24, 2006
filing date -
Oct 24, 2005
priority date (Note) -
Expired
status (Latency Note)
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Abstract
The present invention provides a method of making a Cu—In—Ga sputtering target by melting Cu, In and Ga, Cu and In or Cu and Ga to form a uniform melt with a pre-determined stoichiometry, which melt is sprayed to cause sprayed uniform melt particles to solidify into Cu—In—Ga particles with the pre-determined stoichiometry. The sputtering target is then made using the Cu—In—Ga particles. In a further aspect of the invention, there is provided a method of producing a thin film absorber layer for solar cell fabrication by sputter depositing a precursor film with a first composition
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