Thin-film transistor and fabrication method thereof, array substrate and display device
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United States of America Patent
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Feb 16, 2016
Grant Date -
Jul 9, 2015
app pub date -
Jun 18, 2013
filing date -
Apr 10, 2013
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Abstract
Embodiments of the invention provide a thin-film transistor and a fabrication method thereof, an array substrate and a display device. The thin-film transistor comprises a gate electrode (2), an active layer (4), source and drain electrodes (6), and a gate insulating layer (3) provided between the gate electrode (2) and the active layer (4). The gate electrode (2) comprises a gate electrode metal layer (23) and a first protection layer (32), the first protection layer (32) is provided between the gate electrode metal layer (23) and the gate insulating layer (3) to isolate the active layer (4) from the gate electrode metal layer (23). The gate electrode metal layer (23) is made of copper or copper alloy.
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