Deep trench via for three-dimensional integrated circuit

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 11373999
APP PUB NO 20190378836A1
SERIAL NO

16002723

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Abstract

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Described herein are apparatuses, methods, and systems associated with a deep trench via in a three-dimensional (3D) integrated circuit (IC). The 3D IC may include a logic layer having an array of logic transistors. The 3D IC may further include one or more front-side interconnects on a front side of the 3D IC and one or more back-side interconnects on a back side of the 3D IC. The deep trench may be in the logic layer to conductively couple a front-side interconnect to a back-side interconnect. The deep trench via may be formed in a diffusion region or gate region of a dummy transistor in the logic layer. Other embodiments may be described and claimed.

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Patent Owner(s)

  • INTEL CORP.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Bohr, Mark Aloha, US 83 1460
Ghani, Tahir Portland, US 701 6999
Kobrinsky, Mauro J Portland, US 113 1466
Mehandru, Rishabh Portland, US 162 1060
Nabors, Marni Portland, US 14 21
Wang, Yih Portland, US 237 701

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