Mask holder for supporting transfer mask
Number of patents in Portfolio can not be more than 2000
United States of America Patent
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-
Dec 19, 2000
Grant Date -
N/A
app pub date -
Nov 25, 1998
filing date -
Nov 26, 1997
priority date (Note) -
Expired
status (Latency Note)
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Abstract
In a mask holder for supporting a transfer mask which includes a thin-film portion having an aperture pattern forming region and a supporting frame portion for supporting the thin-film portion, the mask holder contacts with the thin-film portion except for the aperture pattern forming region.
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