Method to characterize post-processing data in terms of individual contributions from processing stations

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United States of America Patent

PATENT NO 11709432
SERIAL NO

17283307

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Abstract

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A method for characterizing post-processing data in terms of individual contributions from processing stations, the post-processing data relating to a manufacturing process for manufacturing integrated circuits on a plurality of substrates using a corresponding processing apparatus for each of a plurality of process steps, at least some of the processing apparatuses each including a plurality of the processing stations, and wherein the combination of processing stations used to process each substrate defines a process thread for the substrate; the method including: obtaining post-processing data associated with processing of the plurality of substrates in a cyclic sequence of processing threads; and determining an individual contribution of a particular processing station by comparing a subset of the post-processing data corresponding to substrates having shared process sub-threads, wherein a process sub-thread describes the process steps of each process thread other than the process step to which the particular processing station corresponds.

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Patent OwnerAddress
ASML NETHERLANDS B VDE RUN 6501 VELDHOVEN 5504 DR

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Tel, Wim Tjibbo Helmond, NL 77 464
Van, Hemert Tom Veldhoven, NL 4 1
Viatkina, Ekaterina Mikhailovna Eindhoven, NL 3 1

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