Vertical-cavity surface-emitting laser
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United States of America Patent
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Sep 19, 2023
Grant Date -
Sep 3, 2020
app pub date -
Feb 21, 2020
filing date -
Feb 28, 2019
priority date (Note) -
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Abstract
A vertical-cavity surface-emitting laser (VCSEL) including a lower mirror, an upper mirror, an active layer interposed between the lower mirror and the upper mirror, an aperture forming layer interposed between the upper mirror and the active layer, and including an oxidation layer and a window layer surrounded by the oxidation layer, a ring-shaped trench passing through the upper mirror, the aperture forming layer, and the active layer to define an isolation region therein, and a plurality of oxidation holes disposed in the isolation region surrounded by the trench, and passing through the upper mirror and the aperture forming layer.
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