Surface acoustic wave device and method of manufacture thereof

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United States of America Patent

PATENT NO 6534901
SERIAL NO

09890914

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Abstract

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A SAW element (13) is formed of a piezoelectric substrate (14), on which are provided IDT electrodes (15), connection electrodes (16), underlying metal layers (17), and acoustic materials (18) placed on the underlying metal layers (17) and having surfaces parallel to the main surface of the piezoelectric substrate (14). The SAW element is mounted in a package (10), which is provided with external terminals (11) connected with the connection electrodes (16), and the package is hermetically sealed with a lid (20) to form a SAW device. When such a SAW element (13) is mounted faceup in a package (10) using a vacuum chuck (30), its piezoelectric substrate (14) can be protected against damage. When a SAW element (13) provided with bumps (23) on its connection electrodes (16) is mounted facedown in a package (10), the failure of electrical connections can be prevented.

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Patent Owner(s)

  • MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD.

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Fujii, Kunihiro Osaka, JP 34 294
Koga, Takafumi Osaka, JP 5 28
Matsuo, Satoshi Kyoto, JP 26 359
Murakami, Kozo Osaka, JP 17 245
Takada, Masahiro Osaka, JP 76 927
Tsuzuki, Shigeru Osaka, JP 19 155

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