Micromachined rate and acceleration sensor
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United States of America Patent
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-
Nov 2, 1999
Issued Date -
N/A
app pub date -
Aug 14, 1998
filing date -
May 27, 1997
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A monolithic substrate for acceleration and angular rate sensing. The substrate comprises a support frame, and a first accelerometer formed in the substrate. The first accelerometer has a proof mass including first and second opposite edges. A flexure connects the first edge of the proof mass to the support frame. The flexure defines a hinge axis for the proof mass. The first accelerometer further includes a torsion stabilizing strut coupling a portion of the proof mass to the frame.
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