Manufacturing method for semiconductor device, semiconductor device and semiconductor chip

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 8552545
APP PUB NO 20050230804A1
SERIAL NO

11085265

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Abstract

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A manufacturing method for a semiconductor device includes: the step of preparing a semiconductor chip which is provided with a functional element formed on a front surface side of a semiconductor substrate, a feedthrough electrode which is placed within a through hole that penetrates the semiconductor substrate, a front surface side connection member which protrudes from the front surface, and a rear surface side connection member which has a joining surface within a recess that is formed in a rear surface; the step of preparing a solid-state device where a solid-state device side connection member for connection to the front surface side connection member is formed on one surface; and the joining step of making the front surface of the semiconductor chip face the first surface of the solid-state device by holding the rear surface of the semiconductor chip, and of joining the front surface side connection member to the solid-state device side connection member.

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Patent Owner(s)

  • RENESAS ELECTRONICS CORPORATION;ROHM CO., LTD.

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Akiyama, Yukiharu Tokyo, JP 37 642
Tanida, Kazumasa Miyagi, JP 63 736
Umemoto, Mitsuo Osaka, JP 40 801

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