Thin film transistor, method for fabricating the same and display device
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United States of America Patent
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Mar 23, 2010
Grant Date -
Jan 3, 2008
app pub date -
Dec 26, 2006
filing date -
Jun 30, 2006
priority date (Note) -
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Abstract
A method for fabricating a TFT on a substrate includes forming a gate electrode; forming a semiconductor layer insulated from the gate electrode and partially overlapped with the gate electrode; forming a gate insulating layer between the gate electrode and the semiconductor layer, the gate insulating layer including a sol-gel compound; and forming source and drain electrodes at both sides of the semiconductor layer.
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