MEMS capacitive microphone

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 11337005
APP PUB NO 20210185448A1
SERIAL NO

17268466

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Importance

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Abstract

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A MEMS capacitive microphone according to the present invention is configured such that a support plate 120 from which an inside thereof has been removed in a plane is attached to supports 110 each having an end fixed to a substrate 100, an anchor 130 is attached to an edge region of the support plate 120, an edge of a diaphragm 200 is supported by the anchor 130, and a “substrate-free area” includes the anchor 130 in a plan view, and pluralities of moving comb fingers 300 and stiffeners are attached to a top or bottom or a top and bottom of the diaphragm 200, and the supports 110 support the stationary comb fingers 400 arranged at predetermined intervals on both sides of the moving comb fingers 300 in a plan view.

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Patent Owner(s)

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International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kim, Kyeong Won Daejeon, KR 1 2
Lee, Tae Joon Goyang-si, KR 1 2

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