Scanning probe microscope apparatus

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United States of America Patent

PATENT NO 7904966
APP PUB NO 20090261249A1
SERIAL NO

12375683

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Abstract

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There is provided a scanning probe microscope apparatus which has a high sensitivity for the interaction between the cantilever and the sample and comprises a cantilever that can oscillate stably in dynamic mode even when a mechanical Q value is low.) match.

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Patent Owner(s)

  • JAPAN SCIENCE AND TECHNOLOGY AGENCY

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kawakatsu, Hideki Setagaya-ku, JP 24 124
Kobayashi, Dai Adachi-ku, JP 45 263
Nishida, Shuhei Kunitachi, JP 14 43

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