INSPECTION METHOD AND INSPECTION APPARATUS
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United States of America Patent
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Nov 4, 2014
Grant Date -
Nov 13, 2014
app pub date -
May 12, 2014
filing date -
May 13, 2013
priority date (Note) -
Granted
status (Latency Note)
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Abstract
The field of view of an objective lens is divided into two areas, and a transmission image of a photomask and a composite image obtained by optically synthesizing a transmission image and a reflection image of the photomask are picked up in parallel. A drop image generated at an edge portion of a pattern portion in the composite image is deleted by limiter processing or masking processing, or is deleted by using primary-differentiated signals of a composite image signal and a transmission image signal.
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