Pellicle mounting apparatus
Number of patents in Portfolio can not be more than 2000
United States of America Patent
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Sep 16, 2003
Grant Date -
Aug 22, 2002
app pub date -
Feb 16, 2001
filing date -
Feb 16, 2001
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
The invention features an apparatus for mounting a pellicle to a reticle. The apparatus includes: a base; a first holder coupled to the base and including two edges positioned to support a first object below its center of gravity and secure the first object in substantially vertical alignment with the base, the first object including one of the pellicle and the reticle; a second holder slidably coupled to the base and including two edges positioned to support a second object below its center of gravity and secure the second object in substantially vertical alignment with the base, the second object including the other of the pellicle and the reticle; and a pressure applicator assembly slidably coupled to the base to adjustably apply pressure to a periphery of the second object held in the second holder and drive it against a corresponding periphery of the first object held in the first holder. In additional embodiments, the apparatus provides automated mounted of the pellicle and reticle.
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Cited Art Landscape
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