Piezoelectric bulk layers with tilted c-axis orientation and methods for making the same

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United States of America Patent

PATENT NO 11381212
APP PUB NO 20190296707A1
SERIAL NO

16359575

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Abstract

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Bulk acoustic wave resonator structures include a bulk layer with inclined c-axis hexagonal crystal structure piezoelectric material supported by a substrate. The bulk layer may be prepared without first depositing a seed layer on the substrate. The bulk material layer has a c-axis tilt of about 32 degrees or greater. The bulk material layer may exhibit a ratio of shear coupling to longitudinal coupling of 1.25 or greater during excitation. A method for preparing a crystalline bulk layer having a c-axis tilt includes depositing a bulk material layer directly onto a substrate at an off-normal incidence. The deposition conditions may include a pressure of less than 5 mTorr and a deposition angle of about 35 degrees to about 85 degrees.

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Patent Owner(s)

  • QORVO US, INC.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Belsick, John Bend, US 19 111
Deniz, Derya McKinney, US 19 387
Kraft, Robert Plano, US 48 596

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