Carboxylate, carboxylic acid generator, resist composition and method for producing resist pattern

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United States of America Patent

PATENT NO 11739056
APP PUB NO 20210263416A1
SERIAL NO

17166322

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Abstract

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Disclosed are a carboxylate represented by formula (I), and a carboxylic acid generator and a resist composition, including the same:

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Patent Owner(s)

  • SUMITOMO CHEMICAL COMPANY, LIMITED

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Anryu, Yukako Osaka, JP 23 87
Ichikawa, Koji Osaka, JP 299 1929
Masuyama, Tatsuro Osaka, JP 69 347

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