Wafer position teaching method and teaching jig

United States of America Patent

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Apr 27, 2010
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Sep 6, 2002
filing date
Sep 7, 2001

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Abstract

An object is to provide a method for teaching the position of a semiconductor wafer automatically and accurately without relying on the sight of an operator as well as a teaching jig that is used for the above method.

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Patent Owner(s)

KABUSHIKI KAISHA YASKAWA DENKI

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G05B:CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTION....

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Inventor(s)

Inventor Name	Address	# of filed Patents	Total Citations
Adachi, Masaru	Fukuoka, JP	27	441
Kawabe, Mitsunori	Fukuoka, JP	6	46
Shigesada, Masaru	Okayama, JP	1	19

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Wafer position teaching method and teaching jig

Number of patents in Portfolio can not be more than 2000

United States of America Patent

10488694

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US Family Size	Non-US Coverage
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DATE PUBLISHED	PUBLICATION/PATENT NO.	PUBLICATION TYPE
April 27, 2010	US,7706919,B2 US7706919B2	GRANTED PATENT AS SECOND PUBLICATION
February 17, 2005	US,20050034288,A1 US20050034288A1	FIRST PUBLISHED PATENT APPLICATION

PATENT NO	7706919
SERIAL NO	10488694
DOCKET NO

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10488694

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