Superconductor-semiconductor fabrication

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 11974509
APP PUB NO 20230247918A1
SERIAL NO

18054488

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Abstract

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A mixed semiconductor-superconductor platform is fabricated in phases. In a masking phase, a dielectric mask is formed on a substrate, such that the dielectric mask leaves one or more regions of the substrate exposed. In a selective area growth phase, a semiconductor material is selectively grown on the substrate in the one or more exposed regions. In a superconductor growth phase, a layer of superconducting material is formed, at least part of which is in direct contact with the selectively grown semiconductor material. The mixed semiconductor-superconductor platform comprises the selectively grown semiconductor material and the superconducting material in direct contact with the selectively grown semiconductor material.

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Patent Owner(s)

  • MICROSOFT TECHNOLOGY LICENSING, LLC.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Krogstrup, Jeppesen Peter Frederiksberg, DK 15 26

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