Optical apparatus, measurement method, and semiconductor device manufacturing method
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Aug 1, 2006
Grant Date -
Aug 12, 2004
app pub date -
Jul 25, 2003
filing date -
Jul 25, 2002
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
An optical apparatus includes an optical device arranged on an optical path extending from a light source to a predetermined position, an optical sensor, and a measuring device which measures an optical characteristic or a change in an optical characteristic of the optical device on the basis of an output from the optical sensor. The optical sensor is arranged outside the optical path and senses light which is emitted from a second light source arranged outside the optical path and is reflected by the optical device.
First Claim
Family
International Classification(s)
Cited Art Landscape
Patent Citation Ranking
Advertisement
Advertisement
Advertisement
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully