Piezoelectric element and method for manufacturing the same
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United States of America Patent
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Apr 12, 2011
Grant Date -
May 31, 2007
app pub date -
Mar 28, 2006
filing date -
Nov 30, 2005
priority date (Note) -
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status (Latency Note)
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Abstract
A coating film is formed on the whole surface area of a body part. Formation of the coating film may be done by immersing the body part in a solution of parfluoropolyether. Then, the parfluoropolyether constituting the coating film is joined with the side surfaces of the body part by irradiating Xenon excimer laser in a nitrogen atmosphere onto the side faces of the body part, or to the surface exposing an electrode layer. As a result, the protective film is formed only on the side surfaces of the body part. Thus, the protective film is formed as a monomolecular film. Total body part is then cleaned by 2,3-dihydrodecafluoropentane to remove non-reacted coating film, thereby completing a multi-layer piezoelectric element.
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