Substrate processing system including dual ion filter for downstream plasma

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 11967486
APP PUB NO 20220076924A1
SERIAL NO

17424381

Stats

ATTORNEY / AGENT: (SPONSORED)

Importance

Loading Importance Indicators... loading....

Abstract

See full text

A substrate processing system includes an upper chamber and a gas delivery system to supply a gas mixture to the upper chamber. An RF generator generates plasma in the upper chamber. A lower chamber includes a substrate support. A dual ion filter is arranged between the upper chamber and the lower chamber. The dual ion filter includes an upper filter including a first plurality of through holes configured to filter ions. A lower filter includes a second plurality of through holes configured to control plasma uniformity.

Loading the Abstract Image... loading....

First Claim

See full text

Family

Loading Family data... loading....

Patent Owner(s)

  • LAM RESEARCH CORPORATION

International Classification(s)

  • [Classification Symbol]
  • [Patents Count]

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Amburose, Gnanamani Fremont, US 4 7
Bravo, Andrew Stratton Piedmont, US 4 122
Chokshi, Himanshu Fremont, US 4 2
Hsu, Chih-Hsun Cupertino, US 21 39
Kawaguchi, Mark San Carlos, US 18 303
Kon, Shih-Chung Fremont, US 11 50
Kosche, Serge San Francisco, US 5 9
Whitten, Stephen Danville, US 8 57
Zhang, Dan Fremont, US 243 716

Cited Art Landscape

Load Citation

Patent Citation Ranking

Forward Cite Landscape

Load Citation

Maintenance Fees

Fee Large entity fee small entity fee micro entity fee due date
3.5 Year Payment $1600.00 $800.00 $400.00 Oct 23, 2027
7.5 Year Payment $3600.00 $1800.00 $900.00 Oct 23, 2031
11.5 Year Payment $7400.00 $3700.00 $1850.00 Oct 23, 2035
Fee Large entity fee small entity fee micro entity fee
Surcharge - 3.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge - 7.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge - 11.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge after expiration - Late payment is unavoidable $700.00 $350.00 $175.00
Surcharge after expiration - Late payment is unintentional $1,640.00 $820.00 $410.00