Method for scanning a beam and an apparatus therefor
Number of patents in Portfolio can not be more than 2000
United States of America Patent
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-
Mar 14, 2000
Grant Date -
N/A
app pub date -
Mar 31, 1998
filing date -
Mar 31, 1998
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A method for directing a light beam to a substrate and an apparatus to do the same. A single light beam is directed to a diffractive element. The diffractive element diffracts the single light beam to form a plurality of light beams. A controller generates a first control signal for controlling a digital micromirror device which selectively directs each of the plurality of light beams toward or away from the substrate. A lens focuses each selectively directed beam onto the substrate.
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