Retardance measurement system and method
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United States of America Patent
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Jul 3, 2007
Grant Date -
Jun 15, 2006
app pub date -
Jan 17, 2006
filing date -
Jul 8, 2003
priority date (Note) -
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status (Latency Note)
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Abstract
In an apparatus and method for measuring retardance and slow axis azimuth in sample specimens, a sample is illuminated by circularly polarized monochromatic light which is then analyzed by an elliptical analyzer at different settings. In another embodiment, light conditioned by an elliptical polarizer at various settings illuminates a specimen and the beam exiting the sample is analyzed by a circular analyzer. The elliptical analyzer/polarizer may have selectable ellipticity and azimuth angle, including in some cases a setting of circular polarization. Background images obtained with selected settings of the elliptical analyzer/polarizer, but without the sample present, are used in some embodiments to improve the measurement.
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