Inkjet nozzle device with roof actuator connected to lateral drive circuitry
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United States of America Patent
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Jan 24, 2017
Grant Date -
Mar 17, 2016
app pub date -
Sep 2, 2015
filing date -
Sep 17, 2014
priority date (Note) -
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Abstract
An inkjet printhead integrated circuit includes: a substrate having a silicon layer; a nozzle plate disposed on the silicon layer; and embedded inkjet nozzle devices. Each inkjet nozzle device includes a nozzle chamber having a roof actuator; drive circuitry laterally disposed relative to the nozzle chamber; a connection arm extending parallel with the nozzle plate from the actuator towards the drive circuitry; and a metal via interconnecting each connection arm and the drive circuitry, the metal via extending perpendicularly to the nozzle plate. The drive circuitry is positioned proximal the nozzle plate relative to a plane of the floor.
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